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20nm lift-off fine lines
    20nm lift-off fine lines

    6.8nA at 50kV
    SEM Image

    9nA beam at 80kV
    1024nm image size
    256 pixels
    20bit DAC scanning
    Scan pixel rate 150kHz
    BSD imaging
    No signal average
    Doped Si substrate
    Dry etched W/Ti layer 150nm thick
SEM image


 
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Monday, 05 January 2009
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